The Keithley modular test system S540 offers high voltages up to 3kV and is build with standard Keithley instrumentation like SourceMeters, Scanners and DMM´s. It guarantees a high channel count for a lot of applications in all areas of semiconductor industry. Menu-driven software and control of wafer handlers including customized definition of wafer maps turn this system into a very flexible tool. Since standard instruments are used, maintenance and calibrations can be performed at very low cost and the system might be expanded easily for future requirements.