The Keithley 4200A semiconductor parameter analyzer is a modular 19" unit, which can be configured to customer requirements for many applications.
The WIN-10 operated system can be equipped with up to 8 SMU channels. A pulse generator up to 50MHz allows extremely short measurements, not to heat up small transistor structures and a CVU option enables very sensitive capacitance measurements as a function of bias voltages of up to 400V; the resolution is in the Attofarad (!) area.